Delivering Safety and Precision: SMB’s Double Containment Pump

The Challenge:

The semiconductor industry was in search of a solution that would accurately and safely control the delivery of highly toxic gases from bulk sources, while minimizing the need for frequent cylinder changeouts.

Our Solution:

Senior Metal Bellows designed and manufactured a four-headed, double containment welded bellows vacuum pump to safely extract highly toxic process gases stored in sub-atmospheric cylinders. This pumps flow rate, inlet pressure, and discharge pressure ensure safe, reliable, and efficient delivery of low-pressure gases.

Key Features of our Semiconductor Double Containment Pump:

• Long Life: Uniform, symmetrical welds that assure long life.
• Stainless Steel: All wetted surfaces made from stainless steel except for the valve seal, available in teflon, viton, aluminum or silverplated stainless steel.
• Zero-Maintenance: No wearing surfaces and no lubrication required.
• Hermetically Sealed: Hermetically sealed AM350 welded bellows that provide positive containment. Every pump is pressure tested to assure leak-tight integrity, with certification to mass spectrometer leak testing available.
• High Reliability: Bellows and valves are designed with stress levels below defined endurance limits of materials allowing for 10,000 hours of continuous operation.

The Result:

The Solutions Engineering team at Senior Metal Bellows worked closely with our customers to develop a double containment, edge-welded metal bellows design that virtually eliminates the risk of catastrophic gas release, ensuring a stable and consistent flow rate for dopant gas sources.

Advantages:

• Dual bellows in series deliver robust, true dual containment reliability.
• The cleanest operational pump on the market, constructed from materials that prevent gas stream contamination.
• The design avoids wear and lubrication, relying solely on flexing bellows and reed valves, creating a maintenance-free pumping mechanism that keeps the pumped media pure.