Edge-Welded Metal Bellows PRIME MOVER™ Actuators: Precision Engineering for the Semiconductor Industry

Tailored Solutions for Semiconductor Applications

The PRIME MOVER™ is engineered to meet the rigorous demands of semiconductor manufacturing processes. It eliminates stiction during motion, providing excellent synchronicity for highly repeatable placement of wafers at the micron level. Our actuators are factory preset and tested, offering repeatable and reliable performance with fast system-level integration.

Key Features of PRIME MOVER™ Actuators

All-Metal Construction: Provides a zero-leakage dynamic seal capable of operating in extreme environments.
Wide Temperature Range: Operates effectively across a broad spectrum of temperatures.
High Reliability: Capable of millions of cycles, ensuring long-term operation without maintenance.
Corrosion Resistance: Resistant to various corrosive environments, enhancing durability.
Compact Design: Combines a pressure seal and actuator in the same envelope, significantly reducing size.
Helium Leak Tight Hermetic Seals: Ensures minimal leakage and high performance.

Custom-Engineered Solutions

Senior Metal Bellows specializes in providing custom-engineered solutions for challenging applications. Our PRIME MOVER™ actuators can be manufactured from a variety of high-strength alloys, including stainless steel and high-nickel alloys, ensuring compatibility with process gases and environmental extremes. We offer position monitoring options, such as magnetic and fiber optic switches, for precise control.

Applications

The PRIME MOVER™ is ideally suited for:

Pin lifters
Wafer handling
Shutters
High temperature valves
Robotics
Any application requiring precise linear actuation

Benefits of Servo Pneumatics

Our servo-pneumatic actuators provide compact and easy installation with low energy consumption and minimal heat generation. They offer maintenance-free operation and can accommodate a range of stroke requirements and speeds when coupled with appropriate controllers and proportional valves.